About: http://webisa.webdatacommons.org/373178106

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Next, a first insulating film 417 of a material such as silicon monoxide, calcium fluoride, or the like, is evaporated over at least part of the two electrodes 413 and 415.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com