About: http://webisa.webdatacommons.org/373179921

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Metal compounds such as metal oxides, metal nitrides, metal carbides, metal oxynitrides, metal oxyborides, and combinations thereof can be used to fabricate barrier layers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au