About: http://webisa.webdatacommons.org/37328727

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An object of the present invention is a method for forming a semiconductor device having shallow regions of a desired electrical activity type.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es