About: http://webisa.webdatacommons.org/37337171

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In contrast, as shown in FIG. 9, a Va-group metal (V, Nb, Ta) film 62, which is chemically resistant to halogen, especially fluorine, is coated on the surface of molybdenum 61 and therefore the molybdenum is not etched at all.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com