About: http://webisa.webdatacommons.org/373470180

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Deposition thickness, F.sub.w, is a controllable variable whose value is predictively set
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com