| http://www.w3.org/ns/prov#value | - Substrate 20 is preferably made of a semiconductive material such as silicon, Si, and includes a detection circuit 26 (not shown in FIG. 1; discussed in more detail below with respect to FIG. 3) and may optionally include a control circuit (i.e., on-chip as opposed to off-chip control logic; not shown in FIG. 1).
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