| http://www.w3.org/ns/prov#value | - Numeral 4117 denotes a display part of the measuring device 4115 for displaying a measured result. [0194] As shown in FIG. 9(a), the electrical conductive layer 62 of a thin film of a noble metal such as gold and palladium is formed by the sputtering method for manufacturing a thin film over the whole support 61.
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