About: http://webisa.webdatacommons.org/37403142

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In general, sidewall spacers 38 may include a dielectric material, such as silicon dioxide, silicon nitride or silicon oxynitride, for example.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com