| http://www.w3.org/ns/prov#value | - One of the manufacturing methods is a method which utilizes the same photofabrication as that used in the manufacture of IC or the like and which is used in a case where the line width of the pattern in the light transmitting portion is 0.1 mm or less, and the other method is a mask evaporating method which becomes possible in a case where the thickness of the pattern in 0.1 mm or greater.
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