About: http://webisa.webdatacommons.org/374281614

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Platinum is an expensive material to use in any semiconductor process and a cost savings is achieved in this embodiment and later embodiments of the present invention described below.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com