About: http://webisa.webdatacommons.org/37435865

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Any reasonable W thickness can be used when the contacts are defined with etching techniques, such as RIE of the W and Ge and well known chemicals such as buffered oxide etchant (BOE) or hydrochloric acid (HCl) for the nickel.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au