About: http://webisa.webdatacommons.org/37437843

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the preferred embodiment according to the present invention, the SOI substrate 100 is a commercial product formed by the conventional SIMOX method, with the P type silicon layer 101 thickness of approximately 3 micrometers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com