About: http://webisa.webdatacommons.org/37439516

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one aspect, a method of forming a layer including tungsten oxide includes forming a first layer including tungsten nitride over a substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es