About: http://webisa.webdatacommons.org/374401201

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Efforts have been made to investigate various deposition processes to form layers, especially dielectric layers, based on metal oxides.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com