About: http://webisa.webdatacommons.org/374638465

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A semiconductor light beam position sensor element as claimed in claim 1 wherein said semiconductor layer is a hetero-junction layer with an amorphous silicon carbide film at least on a light-incident side layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com