About: http://webisa.webdatacommons.org/374676477

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As mentioned, the present implementation of the invention is a system to process 300 mm diameter or smaller semiconductor wafers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au