About: http://webisa.webdatacommons.org/374759539

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2 is a schematic cross sectional view of a conventional deposition apparatus and shows a boat 101 which holds several lots introduced into the deposition apparatus 3, each lot at a different position in the boat 101.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com