About: http://webisa.webdatacommons.org/374767163

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	introducing a process gas into a process zone in which the dielectric stack is located, the process gas including oxygen and nitrogen; and
http://www.w3.org/ns/prov#wasQuotedFrom	google.com