About: http://webisa.webdatacommons.org/374943717

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 6 is a schematic representation of certain electrical connections of the offset sputtering PVD chamber of the illustrated embodiment.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com