About: http://webisa.webdatacommons.org/374981887

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Bit-line contact may then be filled with tungsten, n+ doped polycrystalline silicon or other suitable conductive material, and planarized.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk