About: http://webisa.webdatacommons.org/375125380

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 20A is a plan view of the sensor and FIG. 20B is a plan view of the sensor from which the protecting planar substrate 308 is removed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com