About: http://webisa.webdatacommons.org/375280939

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	If the metal oxide is a binary or ternary metal oxide, the metal oxide may be co-deposited.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com