About: http://webisa.webdatacommons.org/37542111

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In an embodiment, one of the zirconium or hafnium oxide layers is formed at a reduced pressure of 10???5 Torr pressure with oxygen gas forming a plasma with a 100 Watt RF generator (not shown) providing the oxidation reactant.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com