PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • This application claims the priority of European patent application 06006933.3, filed Mar. 31, 2006, the disclosure of which is incorporated herein by reference in its entirety.BACKGROUND OF THE INVENTION The invention relates to a device for measuring the flow of a fluid that has a heater and at least two sensing thermopiles integrated on a substrate, in particular a semiconductor substrate.
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