About: http://webisa.webdatacommons.org/375906445

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The wafer 3 is washed with the cleaning fluid such as water is at a relatively low temperature immediately after it is put into the vapor bath 74.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com