About: http://webisa.webdatacommons.org/376068832

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The walls 12, 14 and the cover 16 of the resist stripping chamber 10 can be of any suitable material, such as anodized aluminum, or bare aluminum.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au