About: http://webisa.webdatacommons.org/376128080

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The production process mainly includes chemical vapor deposition (CVD), photolithography, etching, doping and chemical mechanical polishing (CMP).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com