About: http://webisa.webdatacommons.org/376155909

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, a planarization process, such as CMP, etch back, reflow, etc, is performed to define the via contact metal 20 and the fuse metal pattern 50.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com