About: http://webisa.webdatacommons.org/376197907

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thus, the oxidant, such as oxygen or nitrous oxide, may be provided at a stoichiometric rate or at an excess, throughout the deposition, to react with the dielectric material precursors being provided to the deposition apparatus.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com