About: http://webisa.webdatacommons.org/376255261

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate 12 can be formed of a material such as silicon, silicon-on-glass, silicon-on-sapphire, germanium, ceramic, or photomachinable glass.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au