| http://www.w3.org/ns/prov#value | - In the present document, the terms ???radiation??? and ???beam??? are used to encompass all types of electromagnetic radiation or particle flux, including ultraviolet radiation (e.g. with a wavelength of 365, 248, 193, 157 or 126 nm), EUV (extreme ultra-violet radiation, e.g. having a wavelength in the range 5???20 nm), and X-rays, as well as particle beams (such as ion or electron beams).
|
