About: http://webisa.webdatacommons.org/376322155

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, in such a state as shown in FIG. 10D, the upper surface of the pyroelectric wafer 101' is lapped to a thickness of 10 to 100 ??m (FIG. 10E).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com