About: http://webisa.webdatacommons.org/376346191

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	SUMMARY OF THE INVENTION [0007] The present invention is a system for determining a return-on-investment for a production tool change or process change in a semiconductor, data storage, or an allied industry fabrication facility.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com