About: http://webisa.webdatacommons.org/376369133

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This can be accomplished by known process steps in the production of surface micromechanical structures, with undercutting below the freely vibrating areas, so that there is a slight gap between the substrate and the arrangement.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com