About: http://webisa.webdatacommons.org/376453380

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The transfer robot 42 then transfers the wafer 48 from the orientation chamber 34 sequentially to the respective process chambers 38, where the wafer 48 is sequentially subjected typically to CVD, PVD, etching or other processes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com