About: http://webisa.webdatacommons.org/376642493

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A protective layer 44 of a material such as BPSG, PSG, BSG, or silicon dioxide has been formed over the device 120 by CVD or other suitable means.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com