About: http://webisa.webdatacommons.org/376699232

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A conformal nitride layer 704 is formed, such as by CVD, over the working surface of the wafer, lining trenches 220.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com