About: http://webisa.webdatacommons.org/376768838

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Preferably, the substrate is a semiconductor. [0074] The invention will be illustrated in more detail with reference to the following examples, but it should be understood that the present invention is not deemed to be limited thereto.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com