About: http://webisa.webdatacommons.org/377141616

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Substrates or wafers that may be employed in the invention may be any suitable material such as silicon, glass, polyimide, silicon carbide, nickel, and other materials that are easy to fabricate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au