| http://www.w3.org/ns/prov#value | - Numeral 22 denotes a phase-shift pattern (diffraction grating) (F pattern) of a so-called Levinson type or the like, and numeral 24 represents a real-element pattern (R pattern) similar to that of the prior art except for the fact that the minimum line width is a small 0.1 ??m.
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