About: http://webisa.webdatacommons.org/37748938

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Traditionally, MEMS DMs are made by inorganic materials, such as silicon or silicon nitride.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com