About: http://webisa.webdatacommons.org/377553227

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Formation of the buried layer 201 may be achieved using ion implantation in conjunction with an anneal, diffusion, or other high temperature process as is known in the field.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com