About: http://webisa.webdatacommons.org/377593407

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Moreover, since there is no direct contact between the wafer and jig, the temperature profile and temperature difference between the jig area and other area can be minimized.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca