| http://www.w3.org/ns/prov#value | - For example, the plasma may be generated by applying a power density ranging between about 0.03 W/cm2 and about 6.4 W/cm2, which is a RF power level of between about 10 W and about 2000 W for a 200 mm substrate, for example, between about 500 W and about 1100 W at a high frequency such as between 13 MHz and 14 MHz, for example, 13.56 MHz.
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