About: http://webisa.webdatacommons.org/378108984

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	By comparing the extracted difference in image signal using a desired criterion, a defect such as a foreign particle can be detected during the inspection.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au