About: http://webisa.webdatacommons.org/378416491

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In various embodiments, the sacrificial layer comprises TiN, TaN, SiN, metal nitride, or other materials that have wet etch selectivity with respect to the silicon oxide material of the ILD layer 140.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com