About: http://webisa.webdatacommons.org/378430263

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In alternative preferred embodiments, the substrate is quartz, silicon, or other compounds such as a silicon nitride.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es