About: http://webisa.webdatacommons.org/378451932

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In FIGS. 3A-3F, a method of forming an air gap or region between two conductive regions or elements, such as metal lines, according to another aspect of the invention, is diagrammatically illustrated.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca