| http://www.w3.org/ns/prov#value | - In the decompositionally treating agent and decompositionally treating method for fluorocarbons according to the present invention, the fluorocarbons that are each an object of decompositional treatment are exemplified by perfluorocarbons such as CF4, C2F6, C3F8, C4F10, C5F12, C4F8, C4F6 and C5F8 and hydrofluorocarbons such as CH3F, CH2F2, CHF3, C2H4F2 and C2H2F4.
|
