About: http://webisa.webdatacommons.org/378458837

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one embodiment, the isolation layer is a buried oxide layer and the substrate is an n-type or p-type handle wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com